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Evaluation of exposures to fluorocarbon 113 in a horizontal and a vertical laminar airflow clean room.
Bloom TF; Egeland GM
Am Ind Hyg Assoc J 1999 Jul/Aug; 60(4):486-494
Exposures to 1,1,2-trichloro-1,2,2-trifluoroethane or fluorocarbon (FC) 113 were evaluated in a horizontal laminar airflow (HLAF) clean room and a vertical laminar airflow (VLAF) clean room. A full period consecutive samples measurement strategy was employed. Data were used to calculate 8-hour time-weighted averages (8-TWA) for major work groups and to characterize exposures associated with specific cleaning tasks. The MIRAN 1B infrared analyzer was used to estimate peak concentrations. In the HLAF clean room, 8-TWAs ranged from 193 to 439 ppm; in the VLAF clean room, 8-TWAs ranged from 110 to 935 ppm. These levels were below the current Occupational Safety and Health Administration permissible exposure limit and the National Institute for Occupational Safety and Health (NIOSH) recommended exposure limit for FC 113 of 1000 ppm. Short-term sample concentrations ranged from 104 ppm (inspection) to 1080 ppm (assembly) in the HLAF clean room and 51 ppm (packaging)-3380 ppm (flushing) in the VLAF clean room. In the VLAF clean room, several short-term concentrations measured during the flushing task--1421 ppm and 2522 ppm--were above the NIOSH short-term exposure limit (STEL) of 1250 ppm. These data suggest the possibility that the STEL may be exceeded for tasks involving direct work with liquid FC 113. Peak exposure levels may be reduced by modification of worker position in the HLAF clean room and by use of open wire tables in the VLAF clean room.
Fluorocarbons; Air-flow; Exposure-levels; Sampling; Exposure-limits; Sampling-methods; Work-environment; Author Keywords: 113; clean room; fluorocarbon 113; Freon; 1,1,2-trichloro-1,2,2-trifluoroethane
National Institute for Occupational Safety and Health (NIOSH), 4676 Columbia Parkway, Cincinnati, OH 45226
Issue of Publication
American Industrial Hygiene Association Journal
Page last reviewed: November 6, 2020
Content source: National Institute for Occupational Safety and Health Education and Information Division