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Correlating auger electron spectroscopy with scanning electron microscopy-energy dispersive spectroscopy for the analysis of respirable particles.
Stephens-JW; Harrison-JC; Wallace-WE
Scanning 1998 Apr; 20:302-310
A method has been developed to characterize large populations of individual respirable particles. With the use of custom data collection and data correlation computer software, the same set of particles can be analyzed in multiple instruments. The method is demonstrated by the analysis of a sample of hard-metal particles. A series of particles are analyzed by Auger electron spectroscopy, and then the same particles are analyzed by scanning electron microscopy-energy dispersive spectroscopy.
Respirable-dust; Respiration; Data-processing; Computer-software; Computer-models; Computer-equipment; Hard-metals; Hard-metal-disease; Spectroscopes; Electronic-devices; Electronic-equipment; Electronic-components; Author Keywords: Auger electron spectroscopy; scanning electron microscopy; hard-metal; data analysis, respirable particles
James W Stephens, NIOSH, 1095 Willowdale Road, Morgantown, WV 26505, USA
Page last reviewed: September 2, 2020
Content source: National Institute for Occupational Safety and Health Education and Information Division