NIOSHTIC-2 Publications Search
Reactive sputtering of zirconium with oxygen.
Blickensderfer-RA; Lincoln-RL; Romans-PA
Thin Solid Films 1976 Sep; 37(3):L73-L75
This paper presents the results of research conducted to determine the effect of oxygen pressure on the sputtering of zirconium. The methods and equipment that were used are described.
OP; Journal Article
Thin Solid Films
Page last reviewed: April 12, 2019
Content source: National Institute for Occupational Safety and Health Education and Information Division