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Sputtering Apparatus for Coating Elongated Tubes and Strips.
U S Pat 4 290 877 Sept 22 1981 :
Elongated tubes and strips are sputter coated without increasing the size of the sputtering target or cathode in the sputtering chamber. The workpiece is moved in the direction of its length beneath a conventional disk cathode or target, and, in the case of tubular workpieces, is simultaneously rotated. To accomodate elongated workpieces, 2 horizontal tubes (150 cm long x 13 cm diam) are added on opposite sides of the sputtering chamber. The tubes are attached to the chamber such that the workpiece is passed under 2 sputtering targets during a sputtering operation. The workpiece can be coated with a first target material and then with a second without opening the vacuum chamber.
U.S. Pat. 4,290,877, Sept. 22, 1981; Chem. Abst. 95:214,038D
Page last reviewed: September 2, 2020
Content source: National Institute for Occupational Safety and Health Education and Information Division