Glove permeation by semiconductor processing mixtures containing glycol-ether derivatives.
Zellers-ET; Ke-H; Smigiel-D; Sulewski-R; Patrash-SJ; Han-M; Zhang-GZ
Am Ind Hyg Assoc J 1992 Feb; 53(2):105-116
A series of experiments was performed to determine the effectiveness of different types of gloves in preventing permeation of chemical mixtures and pure components used in the processing and formation of semiconductors. Tested materials included: butyl, nitrile, and natural rubber as well as natural rubber/neoprene blend and a natural rubber/neoprene/nitrile blend. Breakthrough times (BT) and permeation rates (PR) were determined using a permeation cell according to the method ASTM F739-85. The compounds used included 2- ethoxyethyl-acetate (111159) (2-EEA), n-butyl-acetate (105464), 2- methoxyethanol (109864) (2-ME), 2-methoxyethyl-acetate (110496) (2- MEA), xylene (1330207), and mixtures of these compounds as they occur in the various processes. Except in the case of xylene or a xylene/2-ME mixture, butyl gloves showed by far the largest BT and PR, and nitrile gloves were second best. The other types of gloves had low BTs and high PRs for every compound and mixture used. Due to large differences in glove properties when exposed to mixtures or individual compounds, the authors suggest empirical evaluation as the only means for determining the safe choice of protective materials. A comparison of materials at 37 and 25 degrees-C revealed that the values of BT were smaller and PR were larger at the higher temperature. The only exception to this was when pure 2- MEA was used with the butyl material; in fact, butyl gloves were least affected by the temperature change.
NIOSH-Publication; NIOSH-Grant; Control-technology; Hand-protection; Skin-protection; Protective-clothing; Materials-testing; Electronics-industry; Organic-solvents
Environmental & Indust Health University of Michigan 109 S Observatory Ann Arbor, MI 48109-2029
111-15-9; 105-46-4; 109-86-4; 110-49-6; 1330-20-7
American Industrial Hygiene Association Journal
University of Michigan at Ann Arbor, Ann Arbor, Michigan