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Toxic Gas Health and Safety Controls for Semiconductor Manufacturing.

Kitchen DR

Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan 1989:151-159

00189063

The necessity for engineering controls and adequate training of employees was discussed in relation to the semiconductor industry, with particular attention drawn to the fact that use of highly toxic and pyrophoric gases were increasing dramatically. One of the most commonly used of the pyrophoric gases was silane (7803625). Others have included arsine (7784421), chlorine (7782505), diborane (19287457), and phosphine (7803512). According to the author, an effective toxic gas strategy must include documentation, location and hardware specifications, dedicated personnel, follow on documentation, audits, and industrial hygiene monitoring. Before these gases are introduced into the manufacturing environment, it is vital that a means of classifying them be established. The site storage for each chemical must be known along with the delivery system by which the chemicals will be brought to the area in which they are to be used. Often it will be necessary to use individually exhausted compartments to provide for the physical separation of incompatible gases. Requirements include provisions for fail safe operation, remotely operated controls and sensing, and materials compatible with the gas to be used in the enclosure. Site procedures must be drafted to govern all operations of a toxic gas program. Perhaps the most important step is the adequate training of employees to be certain they understand and appreciate the hazards of these materials.

Work-practices; Safety-research; Safety-practices; Education; Semiconductors; Toxic-gases; Electronics-industry; Accident-prevention; Explosion-prevention;

7803-62-5; 7784-42-1; 7782-50-5; 19287-45-7; 7803-51-2;

19890101

1989

Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan

MI;