Toxic Gas Health and Safety Controls for Semiconductor Manufacturing.
Authors
Kitchen DR
Source
Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan 1989:151-159
Link
NIOSHTIC No.
00189063
Abstract
The necessity for engineering controls and adequate training of employees was discussed in relation to the semiconductor industry, with particular attention drawn to the fact that use of highly toxic and pyrophoric gases were increasing dramatically. One of the most commonly used of the pyrophoric gases was silane (7803625). Others have included arsine (7784421), chlorine (7782505), diborane (19287457), and phosphine (7803512). According to the author, an effective toxic gas strategy must include documentation, location and hardware specifications, dedicated personnel, follow on documentation, audits, and industrial hygiene monitoring. Before these gases are introduced into the manufacturing environment, it is vital that a means of classifying them be established. The site storage for each chemical must be known along with the delivery system by which the chemicals will be brought to the area in which they are to be used. Often it will be necessary to use individually exhausted compartments to provide for the physical separation of incompatible gases. Requirements include provisions for fail safe operation, remotely operated controls and sensing, and materials compatible with the gas to be used in the enclosure. Site procedures must be drafted to govern all operations of a toxic gas program. Perhaps the most important step is the adequate training of employees to be certain they understand and appreciate the hazards of these materials.
Links with this icon indicate that you are leaving the CDC website.
The Centers for Disease Control and Prevention (CDC) cannot attest to the accuracy of a non-federal website.
Linking to a non-federal website does not constitute an endorsement by CDC or any of its employees of the sponsors or the information and products presented on the website.
You will be subject to the destination website's privacy policy when you follow the link.
CDC is not responsible for Section 508 compliance (accessibility) on other federal or private website.
For more information on CDC's web notification policies, see Website Disclaimers.
CDC.gov Privacy Settings
We take your privacy seriously. You can review and change the way we collect information below.
These cookies allow us to count visits and traffic sources so we can measure and improve the performance of our site. They help us to know which pages are the most and least popular and see how visitors move around the site. All information these cookies collect is aggregated and therefore anonymous. If you do not allow these cookies we will not know when you have visited our site, and will not be able to monitor its performance.
Cookies used to make website functionality more relevant to you. These cookies perform functions like remembering presentation options or choices and, in some cases, delivery of web content that based on self-identified area of interests.
Cookies used to track the effectiveness of CDC public health campaigns through clickthrough data.
Cookies used to enable you to share pages and content that you find interesting on CDC.gov through third party social networking and other websites. These cookies may also be used for advertising purposes by these third parties.
Thank you for taking the time to confirm your preferences. If you need to go back and make any changes, you can always do so by going to our Privacy Policy page.