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Evaluating Risks Associated with the Use of Silane.

Moskowitz-PD; Fthenakis-VM; Youngblood-RW; Mendez-SR

Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan 1989:97-113

00189060

The results of an analysis of hazards associated with silane (7803625) (SiH4) initiated explosions were presented. The danger from a SiH4 explosion would depend on the energy content of the explosive mixture, distance to sensitive objects, and the nature of the target. Calculations suggested that an explosion of 16 kilograms of SiH4 would generate a peak overpressure of about 400 pounds per square inch (psi) in the vicinity of the source. The safe overpressure threshold of 1psi would be met at about 50 meters. Such explosions could cause secondary effects such as fire or leakage in other gas distribution systems. Various methods were discussed for examining causative events that result in accidents and determining the causes of their occurrence. Two of the more widely used methods were Hazard and Operability (HAZOP) and Fault Tree Analysis (FTA). HAZOP, a systematic "what if" approach identified the consequences of abnormal incidents resulting in undesirable events. FTA was a deductive top down approach for finding basic causes of a particular accident. Both methods were used to identify combinations of component and system failures which could result in a SiH4 initiated fire or explosion in a hypothetical amorphous silicon photovoltaic cell manufacturing facility. Methods for preventing SiH4 initiated fires and explosions were listed. The authors recommend that systems used to handle SiH4 should be systematically evaluated before construction or operation to ensure that safeguards and redundancies are incorporated into gas handling systems.

Semiconductors; Electronics-industry; Safety-measures; Accident-prevention; Explosion-prevention; Explosive-gases; Flammable-gases; Safety-research;

7803-62-5;

19890101

1989

Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan

MI;