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Results of Industrial Hygiene Sampling in Semiconductor Manufacturing Operations.
Scarpace-L; Williams-M; Baldwin-D; Stewart-J; Lassiter-DV
Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan 1989:47-52
Industrial hygiene sampling for organic solvents in common use in the semiconductor industry was conducted by participating companies, and reported to the Semiconductor Industry Association (SIA); results of this sampling were reported. Routine, compliance determination, employee complaint and leak or spill monitoring data were reported by nine companies. Specific data was discussed for acetone (67641), methylene-chloride (75092), n-butyl-acetate (123864), xylene (1330207), 2-ethoxyethanol (110805), and 2- ethoxyethyl-acetate (111159). More than 1500 airborne samples met the criteria for evaluation. A common finding for most of the monitoring results was a geometric standard deviation in excess of three. In general, such high geometric standard deviations involved a wide range in sampling results and were greatly influenced by outlying sample concentrations. However, the authors state that this is perhaps not inconsistent for those situations in which the great majority of concentrations are very small and represent the aggregate sampling results derived from a variety of agencies. The monitoring results presented may be the most complete for this industry thus far available.
Industrial-hygiene-programs; Workplace-monitoring; Information-systems; Organic-solvents; Chlorinated-hydrocarbons; Semiconductors; Electronics-industry; Air-monitoring; Solvent-vapors;
67-64-1; 75-09-2; 123-86-4; 1330-20-7; 110-80-5; 111-15-9;
Hazard Assessment and Control Technology in Semiconductor Manufacturing, Lewis Publishers, Inc., Chelsea, Michigan