Preliminary Control Technology Survey of Motorola, Inc., Phoenix, Arizona, Report No. CT-115-14a.
Ungers-LG; Smith-RK; Rose-S
NIOSH 1983 Mar; :1-20
As part of a control technology assessment of the electronic components industry, a preliminary survey was conducted at Motorola, Inc., Phoenix, Arizona. This facility manufactured silicon crystals and produced silicon wafers. The specific operations visited during this survey included silicon crystal growing and wafer production. The facility had a ventilation system which circulates room air at ten air exchanges per hour. Seventy five percent of the air was recycled. Process vent gases from epitaxial reactors were scrubbed by water spray scrubbers inside the equipment. Epitaxial cabinet vents were vented directly to the atmosphere. Worker protection was further enhanced by shielding from x-ray exposure and electrical interlocks on slicing equipment. Atmospheric monitoring was carried out for hydrogen (1333740) gas, by a Gastech monitor. No on line monitoring was done for arsine (7784421) or phosphine (7803512); intermittent sampling is performed using both personal and area samplers. New employees were required to attend safety programs and take courses. Safety requirements were included as an integral part of the training program. Workers were supplied with a variety of personal protective equipment including goggles, gowns, gloves, and boots. A face shield was also available. Respirators were not worn during normal operations. The authors conclude that the epitaxial area should be studied further, particularly the lack of engineering controls in the silicon-tetrachloride supply to the epitaxial process.
Field-Study; CT-115-14a; NIOSH-Survey; Region-9; Semiconductors; Electronics-industry; Silicon-compounds; Toxic-gases; Personal-protective-equipment; Industrial-hygiene; IA-AR-75-FO-142-0;
1333-74-0; 7784-42-1; 7803-51-2;
Field Studies; Control Technology
NTIS Accession No.
Control Technology and Personal Protective Equipment; Research Tools and Approaches;
Battelle Columbus Laboratories, Columbus, Ohio, NIOSH Report No. CT-115-14a, 20 pages