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Preliminary control technology survey of Motorola, Inc., Phoenix, Arizona.
Ungers LG; Smith RK; Rose S
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 115-14a, 1983 Mar; :1-20
As part of a control technology assessment of the electronic components industry, a preliminary survey was conducted at Motorola, Inc., Phoenix, Arizona. This facility manufactured silicon crystals and produced silicon wafers. The specific operations visited during this survey included silicon crystal growing and wafer production. The facility had a ventilation system which circulates room air at ten air exchanges per hour. Seventy five percent of the air was recycled. Process vent gases from epitaxial reactors were scrubbed by water spray scrubbers inside the equipment. Epitaxial cabinet vents were vented directly to the atmosphere. Worker protection was further enhanced by shielding from x-ray exposure and electrical interlocks on slicing equipment. Atmospheric monitoring was carried out for hydrogen (1333740) gas, by a Gastech monitor. No on line monitoring was done for arsine (7784421) or phosphine (7803512); intermittent sampling is performed using both personal and area samplers. New employees were required to attend safety programs and take courses. Safety requirements were included as an integral part of the training program. Workers were supplied with a variety of personal protective equipment including goggles, gowns, gloves, and boots. A face shield was also available. Respirators were not worn during normal operations. The authors conclude that the epitaxial area should be studied further, particularly the lack of engineering controls in the silicon-tetrachloride supply to the epitaxial process.
Field-Study; NIOSH-Survey; Region-9; Semiconductors; Electronics-industry; Silicon-compounds; Toxic-gases; Personal-protective-equipment; Industrial-hygiene; IA-AR-75-FO-142-0
1333-74-0; 7784-42-1; 7803-51-2
Field Studies; Control Technology
NTIS Accession No.
National Institute for Occupational Safety and Health
Page last reviewed: March 11, 2019
Content source: National Institute for Occupational Safety and Health Education and Information Division