Preliminary Survey Report: Control Technology for Gallium Arsenide Processing at Texas Instruments, Dallas, Texas, Report No. CT-163- 16a.
NIOSH 1988 Feb:8 pages
A study was conducted at Texas Instruments (SIC-3674), Dallas, Texas, to evaluate the technology currently available for controlling gallium-arsenide (1303000) (GaAs) dusts in the semiconductor industry. At this facility, GaAs optoelectronic devices were produced along with monolithic microwave integrated circuits and field effect transistors in low volume quantities. Hazardous chemicals used included methanol (67561), ammonia (7664417), silane (7803625), hydrochloric-acid (7647010), nitric- acid (7697372), hydrofluoric-acid (7664393), sulfuric-acid (7664939), chromic-acid (1333820), silicon-tetrafluoride (7783611), tellurium (13494809), and cadmium-telluride (1306258). A localized exhaust was being designed at this facility for cleaning crystal pullers. To clean the beryllium implanter saws, a dry bead blaster was employed. Chemical fume hoods were used in the production areas with 100 linear feet per minute being the minimum face velocity at 2 inches above the work surface. The minimum face velocity on the exhaust hoods for cleaning the ion implant source areas was 125 linear feet per minute. The coolant catch basin at the sawing or slicing operation for GaAs wafers was enclosed with a rubber skirting. A general summary of work practices, monitoring, and personal protective equipment was included. The author concludes that some useful control measures are employed at this facility for limiting the potential exposures.
NIOSH-Author; NIOSH-Survey; Field-Study; CT-163-16a; Region-6; Semiconductors; Dust-control; Dust-inhalation; Respirable-dust; Ventilation-systems; Control-technology; Control-methods;
1303-00-0; 67-56-1; 7664-41-7; 7803-62-5; 7647-01-0; 7697-37-2; 7664-39-3; 7664-93-9; 1333-82-0; 7783-61-1; 13494-80-9; 1306-25-8;
Field Studies; Control Technology
NTIS Accession No.
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
Engineering Control Technology Branch, NIOSH, Cincinnati, Ohio, Report No. CT-163-16a, 8 pages, 3 references