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Preliminary survey report: control technology for gallium arsenide processing at Texas Instruments, Dallas, Texas.

Authors
Lenihan-KL
Source
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 163-16a, 1988 Feb; :1-8
NIOSHTIC No.
00179880
Abstract
A study was conducted at Texas Instruments (SIC-3674), Dallas, Texas, to evaluate the technology currently available for controlling gallium-arsenide (1303000) (GaAs) dusts in the semiconductor industry. At this facility, GaAs optoelectronic devices were produced along with monolithic microwave integrated circuits and field effect transistors in low volume quantities. Hazardous chemicals used included methanol (67561), ammonia (7664417), silane (7803625), hydrochloric-acid (7647010), nitric- acid (7697372), hydrofluoric-acid (7664393), sulfuric-acid (7664939), chromic-acid (1333820), silicon-tetrafluoride (7783611), tellurium (13494809), and cadmium-telluride (1306258). A localized exhaust was being designed at this facility for cleaning crystal pullers. To clean the beryllium implanter saws, a dry bead blaster was employed. Chemical fume hoods were used in the production areas with 100 linear feet per minute being the minimum face velocity at 2 inches above the work surface. The minimum face velocity on the exhaust hoods for cleaning the ion implant source areas was 125 linear feet per minute. The coolant catch basin at the sawing or slicing operation for GaAs wafers was enclosed with a rubber skirting. A general summary of work practices, monitoring, and personal protective equipment was included. The author concludes that some useful control measures are employed at this facility for limiting the potential exposures.
Keywords
NIOSH-Author; NIOSH-Survey; Field-Study; CT-163-16a; Region-6; Semiconductors; Dust-control; Dust-inhalation; Respirable-dust; Ventilation-systems; Control-technology; Control-methods
CAS No.
1303-00-0; 67-56-1; 7664-41-7; 7803-62-5; 7647-01-0; 7697-37-2; 7664-39-3; 7664-93-9; 1333-82-0; 7783-61-1; 13494-80-9; 1306-25-8
Publication Date
19880201
Document Type
Field Studies; Control Technology
Fiscal Year
1988
NTIS Accession No.
PB88-224050
NTIS Price
A02
Identifying No.
ECTB-163-16a
NIOSH Division
DPSE
SIC Code
3674
Source Name
National Institute for Occupational Safety and Health
State
TX; OH
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