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Preliminary survey report: control technology for gallium arsenide processing at Hewlett Packard, San Jose, California.

Authors
Lenihan-KL
Source
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, CT 163-14a, 1987 Apr; :1-9
NIOSHTIC No.
00169480
Abstract
A walk through survey of the Hewlett Packard Company (SIC-3674) facility in San Jose, California, was prompted by an interest in the use of gallium-arsenide (1303000) as an alternative to silicon for the semiconductor industry. This facility produced gallium-arsenide and gallium-phosphide (12063988). Potential hazards existed from solvents, acids, and gases employed in wafer production. Some of the solvents included fluorocarbon compounds, xylene (1330207), and 1,1,1-trichloroethane (25323891). Arsine (7784421), phosphine (7803512), hydrogen (1333740), and silane (7803625) gases were used in the production processes. In the crystal growing area, operators wore smocks, disposable gloves and safety glasses. Disposable respirators were no longer required during cleaning of the crystal pullers. However, supplied air lines were required during the gas cylinder change operation. Self contained breathing apparatus was available for emergency situations. Worker exposures to gallium- arsenide or arsenic (7440382) dust were lower during the cleaning operation than they had been in other similar facilities, perhaps due to the small size of the crystal pullers used at this particular facility. According to the author, this facility is a possible candidate for an in depth industry survey, but may not be representative of the entire industry.
Keywords
NIOSH-Author; NIOSH-Survey; Field-Study; CT-163-14a; Region-9; Semiconductors; Arsenic-compounds; Toxic-vapors; Toxic-gases; Organic-solvents
CAS No.
1303-00-0; 12063-98-8; 1330-20-7; 25323-89-1; 7784-42-1; 7803-51-2; 1333-74-0; 7803-62-5; 7440-38-2
Publication Date
19870401
Document Type
Field Studies; Control Technology
Fiscal Year
1987
NTIS Accession No.
PB87-206611
NTIS Price
A02
Identifying No.
CT-163-14a
NIOSH Division
DPSE
SIC Code
3674
Source Name
National Institute for Occupational Safety and Health
State
CA; OH
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