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Preliminary survey report: control technology for gallium arsenide processing at Raytheon Company, Northborough, Massachusetts.
Lenihan KL; Jones JH
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 163-12a, 1987 Mar; :1-7
A walk through survey evaluated technology available for control of hazardous substances resulting from gallium-arsenide (1303000) (GA) use, especially GA dusts, in semiconductor production at the Raytheon Company, Northborough, Massachusetts. The OSHA standard was 10 micrograms per cubic meter for arsenic. Potential hazards identified included solvent, acid, and gas exposure in production of GA wafers and radio frequency exposure during metallization. In the event of droppage of arsenic-trichloride (7784341), ventilation would shut down, leaving exhaust operational. Leakage in silane (7803625) and hydrogen (1333740) carrying piping would be a fire and explosion hazard. Interlocks were planned for the radio frequency sputterer. Other engineering controls were directed at ventilation, exhaust, and laminar air flow in relevant operations. Safe work practices included aqua-regia (8007565) preparation while most staff were absent, and carrying arsenic-trichloride ampules in plastic containers. Routine air monitoring was not done by the company, but previous personal samples in the epitaxy area did not show detectable levels of arsenic (7440382) or arsine (7784421). A full time nurse was available on site, and safety glasses and polyvinyl- chloride gloves were used where relevant. Recommendations include a regular program of air and wipe sampling and protection of piping. The authors conclude that an in depth survey will probably not be necessary.
NIOSH-Author; NIOSH-Survey; Field-Study; Region-1; Arsenic-compounds; Acids; Gases; Solvents; Radio-waves; Air-sampling; Occupational-exposure; Safety-monitoring; Explosive-gases; Ventilation-equipment
1303-00-0; 7784-34-1; 7803-62-5; 1333-74-0; 8007-56-5; 7440-38-2; 7784-42-1
Field Studies; Control Technology
NTIS Accession No.
National Institute for Occupational Safety and Health
Page last reviewed: March 11, 2019
Content source: National Institute for Occupational Safety and Health Education and Information Division