Preliminary control technology survey report, Rockwell International Corporation, Electronic Devices Division, Newport Beach, California.
Authors
Mihlan GJ; Willson RD
Source
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 115-28a, 1984 Jul; :1-31
A control technology survey was conducted at the electronics devices division of Rockwell International Corporation (SIC-3674), Newport Beach, California, in January, 1982. Engineering controls included isolation, shielding, and local exhaust ventilation. Isolation was used in plasma etching, ion implantation, low pressure chemical vapor deposition, metalization, and wet chemical etching and stripping operations. Shielding was used in ion implantation to limit X-ray emissions, in plasma etching and radiofrequency sputtering to control emissions, and in substrate exposure to control ultraviolet emissions. Local exhaust ventilation was used in wet chemical cleaning and etching, diffusion, thermal oxidation operations, and in the gas storage cabinets. Most operations were automated. Continuous area monitoring for phosphine (7803512) was conducted. Personal protective equipment used included smocks, safety glasses, head covers, and protective shoes. Operators at wet chemical stations were required to wear acid resistant aprons, gloves, and face shields. The facility employed consultants in industrial hygiene. The authors note that the facility does not have a combustible gas monitoring system. Recommendations include installing a combustible gas monitoring system and substitution of silicon-tetrafluoride (7783611) in the plasma etching process with a less toxic substance.
Links with this icon indicate that you are leaving the CDC website.
The Centers for Disease Control and Prevention (CDC) cannot attest to the accuracy of a non-federal website.
Linking to a non-federal website does not constitute an endorsement by CDC or any of its employees of the sponsors or the information and products presented on the website.
You will be subject to the destination website's privacy policy when you follow the link.
CDC is not responsible for Section 508 compliance (accessibility) on other federal or private website.
For more information on CDC's web notification policies, see Website Disclaimers.
CDC.gov Privacy Settings
We take your privacy seriously. You can review and change the way we collect information below.
These cookies allow us to count visits and traffic sources so we can measure and improve the performance of our site. They help us to know which pages are the most and least popular and see how visitors move around the site. All information these cookies collect is aggregated and therefore anonymous. If you do not allow these cookies we will not know when you have visited our site, and will not be able to monitor its performance.
Cookies used to make website functionality more relevant to you. These cookies perform functions like remembering presentation options or choices and, in some cases, delivery of web content that based on self-identified area of interests.
Cookies used to track the effectiveness of CDC public health campaigns through clickthrough data.
Cookies used to enable you to share pages and content that you find interesting on CDC.gov through third party social networking and other websites. These cookies may also be used for advertising purposes by these third parties.
Thank you for taking the time to confirm your preferences. If you need to go back and make any changes, you can always do so by going to our Privacy Policy page.