Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at Digital Equipment Corporation LSI Semiconductor Operations, Hudson, Massachusetts.
A survey of control technology was conducted at Digital Equipment Corporation (SIC-3674), Hudson, Massachusetts, on December 2, 1981. Process operations, engineering controls, ventilation and monitoring systems, and personal protection were evaluated. The company had a comprehensive occupational health and safety program, including industrial hygiene, environmental engineering, health physics, safety, and health services. Control strategies included engineering controls, monitoring systems, work practices, and personal protective equipment. Engineering controls and monitoring systems were either developed by the company or were integral to the process operation or equipment. Several process operations were performed in sealed reaction chambers that isolated the process for the workers. Shielding was used in ion implantation units to limit X-ray, ultraviolet, and radiofrequency radiation. Local exhaust ventilation was used to remove gases and byproducts from various processes and at storage cabinets for toxic and flammable gases. Continuous area monitoring for chemicals, radiation badges, and personal protective equipment were used to control or monitor worker exposures. The authors recommend that the facility be considered for detailed study because of its state of the art process operations and equipment and its facility, which is representative of current fabrication and design trends.
Engineering Control Technology Branch, NIOSH, Cincinnati, Ohio, NTIS PB83-237-198, 35 pages, 6 references