Walk-through survey report: control technology for integrated circuit fabrication at Intel Corporation, Chandler, Arizona.
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, ECTB 115-11a, 1983 May; :1-37
A survey was conducted to identify and evaluate control technology for emissions and work exposures at Intel Corporation (SIC-3674), Chandler, Arizona, on August 12, 1981. The survey was conducted as part of the control technology assessment of the electronic components industry. Approximately 300 persons worked on three shifts in the facility. A full time safety engineer and an industrial hygienist were employed. A full time registered nurse was present during the first two shifts, and a physician was available. Worker education and training were required for all new employees. Process operations surveyed were: chemical vapor deposition, thermal oxidation, doping and hydrogen alloying, wet chemical cleaning processes, photolithography, plasma etching, DC sputtering, and electron beam evaporation. Specific engineering controls assessed in the clean room environment where operation at negative pressure, local exhaust ventilation, automated process control, enclosure, shielding, and interlocks of the operation. The authors conclude that Intel has a well engineered, state of the art facility with a comprehensive health and safety program. Areas that warrant further study are ventilation system design, monitoring systems, work practices, and maintenance activities.