Health hazard evaluation report: HETA-81-435-1142, NCR Microelectronics-Miamisburg, Miamisburg, Ohio.
Parr WH; Murray WE; Flesch JP
Cincinnati, OH: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control, National Institute for Occupational Safety and Health, HETA 81-435-1142, 1982 Jul; :1-15
Radiofrequency radiation from etchers was measured at NCR Microelectronics-Miamisburg (SIC-3611), Miamisburg, Ohio, on September 2, 1981 with a followup survey on June 17, 1982. The evaluation was requested by management to determine potential exposure of an unspecified number of employees. Some radiation leakage was detected around door seals and through glass windows of plasma etchers. OSHA standard for electric field measurements is 4,000 volts squared per meter squared (V2/m2) and measured fields ranged from 5000 to 50,000V2/m2. No magnetic field was in excess of standards. Radiofrequency shielded windows were installed and a followup survey indicated that radiation was not detectable.
NIOSH-Author; NIOSH-Health-Hazard-Evaluation; Hazards-Unconfirmed; Employee-exposure; Electronics-industry; Radiation-exposure; Radiation-monitoring; Radiation-shielding; Radiation-sources; REGION-5; HETA-81-435-1142; NIOSH-Technical-Assistance-Report;
Author Keywords: Radiofrequency Measuring Equipment; plasma systems; etchers; nonionizing radiation; radiofrequency; microwave
Field Studies; Hazard Evaluation and Technical Assistance
NTIS Accession No.
National Institute for Occupational Safety and Health