Integrated micro-analytical system for complex vapor mixtures.
Zellers-ET; Reidy-S; Veeneman-RA; Gordenker-R; Steinecker-WH; Lambertus-GR; Kim-H; Potkay-JA; Rowe-MP; Zhong-Q; Avery-C; Chan-HKL; Sacks-RD; Najafi-K; Wise-KD
Transducers '07 & Lyon & Eurosensors XXI: Proceedings of the 14th International Conference, Transducers, Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), 2007 Jun; :1491-1496
A micro gas chromatograph (muGC) capable of quantitatively analyzing the components of complex vapor mixtures at trace concentrations is described. The muGC features a micro- preconcentrator/focuser (muPCF), dual-column pressure- and temperature-programmed separation module, and an integrated array of nanoparticle-coated chemiresistors. The latest design modifications and performance data are presented. Highlights include a 4-min separation of a 30-component mixture with a 3-m DRIE Si/glass microcolumn, a 14-sec separation of an 11-component mixture on a 25-cm microcolumn, a complete multi-vapor analysis from a hybrid microsystem that combines analytical, rf- wireless, and microcontroller modules, and a rapid analysis driven by a 4-stage peristaltic micropump.
Nanotechnology; Gas-chromatography; Organic-compounds; Organic-vapors; Vapors; Analytical-processes; Temperature-effects; Sampling; Models;
Author Keywords: gas analyzer; gas chromatograph; integrated microsystem; micro-analytical system
Transducers '07 & Lyon & Eurosensors XXI: Proceedings of the 14th International Conference, Transducers, Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France
University of Michigan, Ann Arbor