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Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system.

Authors
Tian-W-C; Chan-HKL; Lu-C-J; Pang-SW; Zeller-ET
Source
J Microelectromechanical Syst 2005 Jun; 14(3):498-507
NIOSHTIC No.
20042741
Abstract
The design, fabrication, and characterization of a multiple-stage Si microfabricated preconcentrator-focuser (PCF) for a micro gas chromatography (GC) system that can provide real-time quantification and identification of complex organic vapor mixtures are presented. The PCF consists of a Si microheater loaded with Carbopack B, Carbopack X, and Carboxen 1000 carbon adsorbent granules, and a Si micromachined cover plate. Deep reactive ion etching is utilized to produce mechanically robust fluidic interconnection adapters hermetically sealed to fused silica capillary tubing for connection to the other components in the GC. This three-stage device is designed to capture compounds spanning up to 4 orders of magnitude in volatility. The dead volume, thermal mass, heating efficiency, and pressure drop of the three-stage PCF are improved significantly over its single-stage PCF predecessor. We demonstrate the successful capture, desorption, and high-resolution chromatographic separation of a mixture of 30 common organic vapors using our three-stage PCF in a conventional GC system. The peak width at half height is <2.05 s for all compounds after elution from the GC column.
Keywords
Gas-chromatography; Organic-compounds; Organic-vapors; Vapors; Thermal-reactions; Chromatographic-analysis; Analytical-processes
CODEN
JMIYET
Publication Date
20050601
Document Type
Journal Article
Funding Type
Grant
Fiscal Year
2005
NTIS Accession No.
NTIS Price
Identifying No.
Grant-Number-R01-OH-003692
Issue of Publication
3
ISSN
1057-7157
Source Name
Journal of Microelectromechanical Systems
State
MI
Performing Organization
University of Michigan, Ann Arbor
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