New nanostructured sensing arrays for hydride detection.
Atlanta, GA: U.S. Department of Health and Human Services, Public Health Service, Centers for Disease Control and Prevention, National Institute for Occupational Safety and Health, R43-OH-008939, 2007 may; :1-32
The goal of the proposed project was to demonstrate the feasibility for the development of improved sensors for the detection of hydrides (including arsine and phosphine) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers about the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety. The electronic sensor array technology demonstrated by Synkera in the Phase I project showed outstanding sensitivity and selectivity toward hydrides. The sensors are based upon a long lasting metal oxide material, combined with an innovative microsensor substrate, which promotes improved performance relative to conventional metal oxide sensors This project takes advantage of advances in nanotechnology, ceramic micromachining and materials chemistry to create sensors that are substantially better than current state of the art. These improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry. The products ultimately envisioned at the ultimate commercialization of this technology include Smart Gas Cards TM for employee personnel monitoring, as well as permanently fixtured, long lasting systems that provide general area alarms.
Monitors; Monitoring-systems; Nanotechnology; Semiconductors; Workplace-monitoring; Personal-protection; Volatiles; Organic-chemicals; Organic-compounds
Debra J. Deininger, Synkera Technologies, Inc., 2021 Miller Drive, Suite B, Longmont, CO 80501
Final Grant Report
NTIS Accession No.
National Institute for Occupational Safety and Health
Synkera Technologies Inc.