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Reactive sputtering of zirconium with oxygen.

Authors
Blickensderfer-RA; Lincoln-RL; Romans-PA
Source
Thin Solid Films 1976 Sep; 37(3):L73-L75
NIOSHTIC No.
10009947
Abstract
This paper presents the results of research conducted to determine the effect of oxygen pressure on the sputtering of zirconium. The methods and equipment that were used are described.
CODEN
THSFAP
Publication Date
19760916
Document Type
OP; Journal Article
Fiscal Year
1976
NTIS Accession No.
NTIS Price
Identifying No.
OP 88-76
ISSN
0040-6090
NIOSH Division
ALRC
Source Name
Thin Solid Films
State
OR
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