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Adapting Conventional Sputtering Equipment for Coating Long Tubes and Strips.

Authors
Lincoln-RL; Blickensderfer-RA
Source
J Vac Sci Technol 1980 17(5):1252-1253
Link
NIOSHTIC No.
10008474
Abstract
A method for adapting conventional sputtering equipment to coat long tubes and strips was devised at the Albany (Oregon) Research Center, Bureau of Mines. This research was part of an effort to meet the Bureau's goal of minimizing the need for critical minerals through conservation, using coatings of metals applied by techniques such as sputtering, cladding, or surface alloying.
Publication Date
19800101
Document Type
OP;
Fiscal Year
1980
NTIS Accession No.
NTIS Price
Identifying No.
OP 60-80
Issue of Publication
5
NIOSH Division
ALRC;
Source Name
J. Vac. Sci. Technol., V. 17, No. 5, Sept.-oct., 1980, PP. 1252-1253
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