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Preliminary Control Technology Survey of Motorola, Inc., Phoenix, Arizona, Report No. CT-115-14a.

Authors
Ungers-LG; Smith-RK; Rose-S
Source
NIOSH 1983 Mar:20 pages
Link
NIOSHTIC No.
00180868
Abstract
As part of a control technology assessment of the electronic components industry, a preliminary survey was conducted at Motorola, Inc., Phoenix, Arizona. This facility manufactured silicon crystals and produced silicon wafers. The specific operations visited during this survey included silicon crystal growing and wafer production. The facility had a ventilation system which circulates room air at ten air exchanges per hour. Seventy five percent of the air was recycled. Process vent gases from epitaxial reactors were scrubbed by water spray scrubbers inside the equipment. Epitaxial cabinet vents were vented directly to the atmosphere. Worker protection was further enhanced by shielding from x-ray exposure and electrical interlocks on slicing equipment. Atmospheric monitoring was carried out for hydrogen (1333740) gas, by a Gastech monitor. No on line monitoring was done for arsine (7784421) or phosphine (7803512); intermittent sampling is performed using both personal and area samplers. New employees were required to attend safety programs and take courses. Safety requirements were included as an integral part of the training program. Workers were supplied with a variety of personal protective equipment including goggles, gowns, gloves, and boots. A face shield was also available. Respirators were not worn during normal operations. The authors conclude that the epitaxial area should be studied further, particularly the lack of engineering controls in the silicon-tetrachloride supply to the epitaxial process.
Keywords
Field-Study; CT-115-14a; NIOSH-Survey; Region-9; Semiconductors; Electronics-industry; Silicon-compounds; Toxic-gases; Personal-protective-equipment; Industrial-hygiene; IA-AR-75-FO-142-0;
CAS No.
1333-74-0; 7784-42-1; 7803-51-2;
Publication Date
19830318
Document Type
Field Studies; Control Technology
Fiscal Year
1983
NTIS Accession No.
PB83-207225
NTIS Price
A03
Identifying No.
CT-115-14a
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches;
Source Name
Battelle Columbus Laboratories, Columbus, Ohio, NIOSH Report No. CT-115-14a, 20 pages
State
AZ; OH;
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