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Preliminary Survey Report: Control Technology for Gallium Arsenide Processing at Honeywell, Inc., Richardson, Texas, Report No. CT-163- 17A.

Authors
Lenihan-KL
Source
NIOSH 1987 Dec:8 pages
Link
NIOSHTIC No.
00177544
Abstract
An evaluation was made of control technology at Honeywell, Inc., (SIC-3674) in Richardson, Texas, which was primarily involved in gallium-arsenide (1303000) wafer fabrication involving about 70 workers. Major hazards were potential chemical exposures to solvents, acids, and gases. Solvents and gases used most frequently included silane (7803625), selenium-hexafluoride (7783791), tetraethoxy-silane (78104), 1,2,4-trichlorobenzene (120821), fluorocarbon compounds, xylene (1330207), 1,1,1-trichloroethane (71556), and glycol ethers. Fabrication processes included cleaning and etching prior to silicon-nitride coating and ion implantation, photoresist applications using photolithography, epitaxial reactions for optoelectronic device production, oxidation, and metallization. Honeywell focussed primarily on ventilation for hazard control, including laminar flow hoods and reaction tubes for process isolation, and scrubbers for effluent gases. Continuous hydrogen monitoring was not done. Medical monitoring consisted of quarterly urine tests for arsenic (74403820). Protective clothing and safety goggles were used. Most training was on the job, and monthly safety meetings were held. The author concludes that since this facility does not engage in crystal growth and has no employee with substantial time to spend for health and safety, it is not recommended for inclusion in an in depth survey of gallium-arsenide safety issues.
Keywords
NIOSH-Author; NIOSH-Survey; Field-Study; CT-163-17A; Region-6; Semiconductors; Dust-control; Vapors; Ventilation-systems; Arsenic-compounds;
CAS No.
1303-00-0; 7803-62-5; 7783-79-1; 78-10-4; 120-82-1; 1330-20-7; 71-55-6; 74403-82-0;
Publication Date
19871201
Document Type
Field Studies; Control Technology
Fiscal Year
1988
NTIS Accession No.
PB88-188628
NTIS Price
A02
Identifying No.
CT-163-17A
NIOSH Division
DPSE;
SIC Code
3674;
Source Name
Division of Physical Sciences and Engineering, Engineering Control Technology Branch, NIOSH, Cincinnati, Ohio, Report No. CT-163-17A, 8 pages, 4 references
State
TX; OH;
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