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Industrial hygiene and control technology assessment of ion implantation operations.

Authors
Ungers-LJ; Jones-JH
Source
Am Ind Hyg Assoc J 1986 Oct; 47(10):607-614
NIOSHTIC No.
00164593
Abstract
Surveys were carried out to describe the controls associated with ion implantation operations and to monitor the workplace for hazardous agents. Control description focused on the engineering aspects, administrative programs and personal protection programs intended to protect the worker, while monitoring for airborne levels of arsenic (7440382) (As), boron (7440428) and phosphorus (7723140), and was conducted to detect the presence of dopant substances in the work environment. Monitoring of ionizing radiation was also conducted near four ion implanters. Results demonstrate that workers were routinely exposed to low level concentrations of dopants, while ionizing radiation did not pose a similar problem. Concentrations did not exceed permissible levels; few areas exceeded a maximum value of 3.6 micrograms per cubic meter, while boron did not exceed 26.8 micrograms per cubic meter. Area samplers at specific maintenance points, however, revealed large concentrations of As (83 to 13.643 micrograms per cubic meter). Based on results obtained, the authors recommend application of a series of measures to reduce worker exposures to dopant compounds and emissions of ionizing radiation, including better protection of maintenance personnel, disposable personal protective equipment, and analysis of As emissions to determine the As compounds present in the work environment during preventive maintenance. Surveys to determine the eventual nature, source and magnitude of nonionizing radiation leakage from radiofrequency equipment are also recommended.
Keywords
Industrial-environment; Occupational-safety-programs; Air-contamination; Air-quality-measurement; Industrial-emissions; Control-methods; NIOSH-Author
CODEN
AIHAAP
CAS No.
7440-38-2; 7440-42-8; 7723-14-0
Publication Date
19861001
Document Type
Journal Article
Fiscal Year
1987
NTIS Accession No.
NTIS Price
Issue of Publication
10
ISSN
0002-8894
Source Name
American Industrial Hygiene Association Journal
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