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Preliminary Survey Report No. CT-115-17a, Control Technology For Integrated Circuit Fabrication, Honeywell Optoelectronics Division, Richardson, Texas.

Authors
Smith-RK; Ungers-LJ
Source
NIOSH 1984 Jul:13 pages
Link
NIOSHTIC No.
00135193
Abstract
A walk through survey of the integrated circuit fabrication operation at Honeywell Optoelectronics Division (SIC-3674), Richardson, Texas, was conducted in December, 1981. Engineering controls consisted of general and local ventilation, and isolation enclosure of the epitaxy and gas cylinder storage areas. The gas storage room was maintained at a slight negative pressure. Gas monitoring was conducted by the company. Liquid wastes were segregated according to type. Acidic wastes were pumped to a drain that carried them to a waste treatment system where they were neutralized with sodium-hydroxide. Organic wastes were placed in containers which were taken to an outdoor area behind the facility where they were emptied into drums for disposal. The facility had no routine industrial hygiene program. Smocks, gloves, and safety glasses were required in all fabrication areas. Respirators were available in case of emergency. Preplacement medical examinations were not administered. Quarterly urinalyses for arsenic (7440382) exposure were conducted on all employees performing sawing operations. The authors recommend that an industrial hygiene consultant be retained. A detailed industrial hygiene survey is not recommended because the facility uses processes that are different from those used in typical silicon wafer production.
Keywords
NIOSH-Author; NIOSH-Survey; Control-technology; Field-Study; Electronics-industry; Ventilation-systems; Storage-facilities; Waste-treatment; Industrial-chemicals; Industrial-hygiene; Arsenic-compounds; Occupational-hazards; CT-115-17a; Region-6;
CAS No.
7440-38-2;
Publication Date
19840703
Document Type
Field Studies; Control Technology
Fiscal Year
1984
NTIS Accession No.
PB85-109023
NTIS Price
A03
Identifying No.
CT-115-17a
NIOSH Division
DPSE;
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
SIC Code
3674;
Source Name
Division of Physical Sciences and Engineering, NIOSH, U.S. Department of Health and Human Services, Cincinnati, Ohio, Report No. CT-115-17a, 13 pages
State
TX; OH;
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