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Preliminary Survey Report No. CT-115-22a, Control Technology For Integrated Circuit Fabrication, Micro-Circuit Engineering, Inc., West Palm Beach, Florida.

Authors
Mihlan-GI; Mitchell-RI; Smith-RK
Source
NIOSH 1984 Jul:23 pages
Link
NIOSHTIC No.
00135192
Abstract
A survey to assess control technology for integrated circuit fabrication was conducted at Microcircuit Engineering, Incorporated (SIC-3674), West Palm Beach, Florida, in December 1981. Engineering controls included local and general exhaust ventilation, shielding, and personal protective equipment. Devices or work stations that contained toxic materials that were potentially dangerous were controlled by local exhaust ventilation. Less hazardous areas were controlled by general exhaust ventilation. Process isolation was used in the plasma etching, low pressure chemical vapor deposition, and metalization operations. Shielding was used in ion implantation units to control X-ray emissions, in contact mask aligners to limit ultraviolet (UV) emissions, and in plasma etching units to control radiofrequency and UV emissions. Most operations were automated. Use of personal protective equipment varied by job function. Heat protective gloves were required during vapor deposition, and goggles, face shields, gloves, and aprons were required when handling chemical solutions. No gas monitoring was observed. Recommendations include installation of a combustible gas monitoring system and preplacement and periodic medical examinations.
Keywords
NIOSH-Author; NIOSH-Survey; Control-technology; Field-Study; Ventilation-systems; Industrial-chemicals; Industrial-hygiene; Ultraviolet-light; Combustible-gases; Radio-waves; CT-115-22a; Region-4;
Publication Date
19840703
Document Type
Field Studies; Control Technology
Fiscal Year
1984
NTIS Accession No.
PB85-100717
NTIS Price
A03
Identifying No.
CT-115-22a
NIOSH Division
DPSE;
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
SIC Code
3674;
Source Name
Division of Physical Sciences and Engineering, NIOSH, U.S. Department of Health and Human Services, Cincinnati, Ohio, Report No. CT-115-22a, 23 pages, 8 references
State
FL; OH;
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