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Preliminary Control Technology Survey Report No. CT-115-26a, Micro Power Systems, Inc., Santa Clara, California.

Authors
Mihlan-GJ; Willson-RD
Source
NIOSH 1984 Jul:31 pages
Link
NIOSHTIC No.
00135190
Abstract
A survey to assess control technology was conducted at Micro Power Systems, Incorporated (SIC-3674), Santa Clara, California, in January, 1982. Engineering controls included isolation, shielding, and local exhaust ventilation. Isolation was used in plasma etching, ion implantation, chemical vapor deposition, epitaxial silicon deposition, and metalization processes. Shielding was used in the ion implantation units to limit X-ray emissions, in plasma etching and epitaxial silicon deposition to control radiofrequency radiation emissions, and in substrate exposure to limit ultraviolet emissions. Local exhaust ventilation was used in wet chemical cleaning and etching, in photolithography processes, and in the diffusion furnaces. The electron beam evaporation, direct current sputtering, plasma etching, ion implantation, and chemical vapor and epitaxial silicon deposition processes were automated. Personal protective equipment used included safety glasses, face shields, acid resistant coveralls, and gloves. The facility had a health and safety program that included worker training in safety, materials handling, personal protective equipment, and hazard reporting. The facility retained consultants in industrial hygiene, safety, and health care. Recommendations include establishing a program of preplacement and periodic medical examinations and evaluation of the ability of the ventilation system to control chromic-acid (7738945), phenol (108952), and antimony-trioxide (1309644).
Keywords
NIOSH-Author; NIOSH-Survey; Control-technology; Electronics-industry; Industrial-engineering; Ultraviolet-light; Field-Study; Industrial-chemicals; X-ray-absorption; Work-practices; Occupational-safety-programs; CT-115-26a; Region-9;
CAS No.
7738-94-5; 108-95-2; 1309-64-4;
Publication Date
19840711
Document Type
Field Studies; Control Technology
Fiscal Year
1984
NTIS Accession No.
PB85-103786
NTIS Price
A04
Identifying No.
CT-115-26a
NIOSH Division
DPSE;
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
SIC Code
3674;
Source Name
Division of Physical Sciences and Engineering, NIOSH, U.S. Department of Health and Human Services, Cincinnati, Ohio, Report No. CT-115-26a, 31 pages, 6 references
State
CA; OH;
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