Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication, Report No. IWS-115-24a.
NIOSH 1983 May:29 pages
A survey was conducted to assess control technology at NEC Electronics USA, Incorporated, Electronics Arrays division (SIC- 3674), at Mountain View, California, in January 1982. The facility mainly used isolation and enclosure of various process operations, air filtration, and local exhaust ventilation to minimize employee exposure. Each local exhaust system was equipped with a water scrubber and demister. Shielding was used to reduce exposure to X- ray, radio frequency, and ultraviolet radiation. Personal protective equipment was also utilized. The facility used a gas detection system for monitoring hydrogen (1333740). The system was set to alarm at 20 and 40 percent of the lower explosive limit for hydrogen. Toxic gas monitoring systems were not used, although the company was considering purchasing a phosphine monitoring system. The authors recommend that potential exposure to ultraviolet radiation be evaluated. The effectiveness of the X-ray and radio frequency shielding should be tested. A program of preplacement and periodic medical examinations should be established, especially for employees using toxic chemicals.
NIOSH-Author; NIOSH-Survey; Field-study; Air-flow; Worker-health; Industrial-hygiene; Toxicology; Employee-exposure; Explosive-gases; IWS-115-24a; Region-9;
NTIS Accession No.
Division of Physical Sciences and Engineering, NIOSH, Cincinnati, Ohio, NTIS PB83-240-747, Report No. IWS-115-24a, 29 pages, 5 references.