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Preliminary Control Technology Survey of INMOS Corporation, Colorado Springs, Colorado.

Authors
Mihlan-GJ; Willson-RD
Source
NIOSH 1983 Oct:30 pages
Link
NIOSHTIC No.
00133455
Abstract
A walk through survey was conducted at INMOS Corporation (SIC-3674), Colorado Springs, Colorado on October 13, 1981 to evaluate control technology for integrated circuit fabrication. Operations performed at the facility included thermal oxidation; photolithographic processes; wet chemical cleaning and etching; plasma etching; chemical vapor deposition of silicon-dioxide (14808607), silicon- nitride (12033895), and polycrystalline-silicon (7440213); diffusion; ion implantation; metalization by radiofrequency sputtering; and hydrogen annealing. Engineering controls varied by process operation and included isolation, local exhaust ventilation, shielding, and enclosure, and process substitution. Microprocessors were used to control process equipment for several operations. Continuous area monitoring for arsine (7784421) and phosphine (7803512) was performed by infrared spectrophotometry. X-ray radiation emissions were monitored with radiation film badges. Personal protective equipment varied by job functions and included safety goggles or glasses, acid resistant shielding, and respirators. The authors conclude that the facility represents the current state of the art in clean room design using a tunnel bay layout. Specific observations and recommendations regarding the effectiveness of control technology at the facility pertain to air circulation, waste management, and valves on gas lines from cylinders containing flammable, toxic, or corrosive gases.
Keywords
NIOSH-Author; NIOSH-Survey; Control-technology; Region-8; Field-Study; Electronics-industry; Safety-engineering; Air-quality-monitoring; Safety-equipment; Industrial-hygiene-programs; Work-environment; Laboratory-workers;
CAS No.
14808-60-7; 12033-89-5; 7440-21-3; 7784-42-1; 7803-51-2;
Publication Date
19831001
Fiscal Year
1984
NTIS Accession No.
PB84-183227
NTIS Price
A03
NIOSH Division
DPSE;
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
SIC Code
3674;
Source Name
Division of Physical Sciences and Engineering, NIOSH, Cincinnati, Ohio, Report No. 115-13a, 30 pages, 1 reference
State
CO; OH;
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