Preliminary Control Technology Survey, Jet Propulsion Laboratory, California Institute of Technology.
Smith-RK; Rose-SA; Ungers-LG
NIOSH 1982 Sep:7 pages
A walk through survey was conducted at the California Institute of Technology, Jet Propulsion Laboratory (JPL), in Pasadena, California, on November 4, 1981. The survey was conducted by NIOSH as part of a control technology assessment of the semiconductor manufacturing industry. Production areas and gas and chemical storage areas were surveyed. The air handling systems were evaluated. Processes evaluated were: junction formation experiments; plasma etching; wet chemical etching; and metallization. The laboratory at JPL had programs for industrial hygiene, safety training, personal protective equipment, medical intervention, and housekeeping that were appropriate for an academic laboratory. Local exhaust ventilation was used to remove process gases and byproducts from the wet and plasma etching operations and the diffusion furnaces. No continuous monitoring was performed and no gas leak detection equipment was in use. The authors conclude that due to the nature of activities at JPL and the small scale of the facility, it is not recommended as a site for further study.
NIOSH-Author; Control-technology; Aerospace-industry; Air-flow; Work-practices; Industrial-ventilation; Worker-health; Region-9;
NTIS Accession No.
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
Division of Physical Sciences and Engineering, NIOSH, Cincinnati, Ohio, NTIS PB83-195-842, 7 pages, 1 reference