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Walk-Through Survey Report: Control Technology for Integrated Circuit Fabrication at Intel Corporation, Chandler, Arizona,.

Authors
Mihlan-GJ; Smith-RK; Ungers-LJ
Source
NIOSH 1983 May:37 pages
Link
NIOSHTIC No.
00131970
Abstract
A survey was conducted to identify and evaluate control technology for emissions and work exposures at Intel Corporation (SIC-3674), Chandler, Arizona, on August 12, 1981. The survey was conducted as part of the control technology assessment of the electronic components industry. Approximately 300 persons worked on three shifts in the facility. A full time safety engineer and an industrial hygienist were employed. A full time registered nurse was present during the first two shifts, and a physician was available. Worker education and training were required for all new employees. Process operations surveyed were: chemical vapor deposition, thermal oxidation, doping and hydrogen alloying, wet chemical cleaning processes, photolithography, plasma etching, DC sputtering, and electron beam evaporation. Specific engineering controls assessed in the clean room environment where operation at negative pressure, local exhaust ventilation, automated process control, enclosure, shielding, and interlocks of the operation. The authors conclude that Intel has a well engineered, state of the art facility with a comprehensive health and safety program. Areas that warrant further study are ventilation system design, monitoring systems, work practices, and maintenance activities.
Keywords
NIOSH-Author; NIOSH-Survey; Control-technology; Field-Study; Exposure-levels; Work-practices; Industrial-hygiene; Safety-practices; Workplace-studies; Ventilation; Safety-programs; CT-115-11a; Region-9;
Publication Date
19830531
Document Type
Field Studies; Control Technology
Fiscal Year
1983
NTIS Accession No.
PB83-237438
NTIS Price
A04
Identifying No.
CT-115-11a
Priority Area
Control Technology and Personal Protective Equipment; Research Tools and Approaches; Control-technology;
SIC Code
3674;
Source Name
Engineering Control Technology Branch, NIOSH, Cincinnati, Ohio, Report No. 115-11a, NTIS PB83-237-438, 37 pages, 2 references
State
AZ; OH;
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